Abstract
In order for recently developed advanced nanowire (NW) devices 1-5 to be produced on a large scale, high integration of the separately fabricated nanoscale devices into intentionally organized systems is indispensable. We suggest a unique fabrication route for semiconductor NW electronics. This route provides a high yield and a large degree of freedom positioning the device on the substrate. Hence, we can achieve not only a uniform performance of Si NW devices with high fabrication yields, suppressing device-to-device variation, but also programmable integration of the NWs. Here, keeping pace with recent progress of direct-writing circuitry,6-8 we show the flexibility of our approach through the individual integrating, along with the three predesigned N-shaped sites. On each predesigned sire, nine bottom gate p-type Si NW field-effect transistors classified according to their on-current level are programmably integrated.
Original language | English |
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Pages (from-to) | 1016-1021 |
Number of pages | 6 |
Journal | Nano letters |
Volume | 10 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2010 Mar 10 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering