Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapor deposition

Sun Gyu Choi, Seok Joo Wang, Hyeong Ho Park, Jin Nyoung Jang, Munpyo Hong, Kwang Ho Kwon, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds