Properties of Ru thin films fabricated on TiN by metal-organic chemical vapor deposition

Ho Jung Sun, Younsoo Kim, Han Sang Song, Jong Min Lee, Jae Sung Roh, Hyun Chul Sohn

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Properties of Ru thin films fabricated on TiN by metal-organic chemical vapor deposition'. Together they form a unique fingerprint.

Physics

Engineering

Chemical Engineering

Material Science

Chemistry