Properties of ZrO2 dielectric layers grown by metalorganic molecular beam epitaxy

Jang Hyuk Hong, Woo Jong Choi, Jae Min Myoung

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ZrO2 dielectric layers were grown on the p-type Si (100) by metalorganic molecular beam epitaxy (MOMBE). Zirconium t-butoxide, Zr(O·t-C4H9)4 was used as a Zr precursor because of its moderate vapor pressure. The properties of the layers were evaluated by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), and capacitance-voltage (C-V) and current density-voltage (J-V) analyses. Two steps in the growth, granule formation and film growth, were considered from the relation between the growth rate and the growth time. The compositional analysis confirmed the stoichiometry of the layer and typical zirconium and oxygen spectra were observed in the XPS result. RMS and average roughnesses increased due to the crystallization of the grains after the annealing treatment. HRTEM image showed that the grown layer was polycrystalline, which was closely related to the degradation of the electrical properties. From the C-V and J-V analyses, dielectric constant of ZrO2 layer was calculated to be 16-17 and the current density was -3.8×10-3 A/cm2 at a gate voltage of -1.5 V.

Original languageEnglish
Pages (from-to)35-40
Number of pages6
JournalMicroelectronic Engineering
Issue number1
Publication statusPublished - 2003 Oct

Bibliographical note

Funding Information:
This work was supported by grant No. R01-2001-00271 from the Basic Research Program of the Korea Science and Engineering Foundation.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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