Pulsed CVD of tungsten thin film as a nucleation layer for tungsten plug-fill

Soo Hyun Kim, Eui Sung Hwang, Sang Yup Han, Seung Ho Pyi, Nohjung Kawk, Hyunchul Sohn, Jinwoong Kim, Gi Bo Choi

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Fingerprint Dive into the research topics of 'Pulsed CVD of tungsten thin film as a nucleation layer for tungsten plug-fill'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy