Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns

Seunggi Seo, Byung Chul Yeo, Sang Soo Han, Chang Mo Yoon, Joon Young Yang, Jonggeun Yoon, Choongkeun Yoo, Ho Jin Kim, Yong Baek Lee, Su Jeong Lee, Jae Min Myoung, Han Bo Ram Lee, Woo Hee Kim, Il Kwon Oh, Hyungjun Kim

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37 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds