Real-Time Plasma Uniformity Monitoring via Selective Plasma Light Intensity Measurement Using Transparent-LCD-Module-Adapted Optical Emission Spectroscopy

In Joong Kim, Chuntaek Park, Dongseok Shin, Ilgu Yun

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Real-Time Plasma Uniformity Monitoring via Selective Plasma Light Intensity Measurement Using Transparent-LCD-Module-Adapted Optical Emission Spectroscopy'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Physics

Mathematics