Fingerprint Dive into the research topics of 'Recrystallization and activation of ultra-high-dose phosphorus-implanted silicon using multi-pulse nanosecond laser annealing'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Recrystallization and activation of ultra-high-dose phosphorus-implanted silicon using multi-pulse nanosecond laser annealing
Hyunsu Shin, Juhee Lee, Minhyung Lee, Hwa Yeon Ryu, Seran Park, Heungsoo Park, Dae Hong Ko
Research output: Contribution to journal › Article › peer-review