Recrystallization and activation of ultra-high-dose phosphorus-implanted silicon using multi-pulse nanosecond laser annealing

Hyunsu Shin, Juhee Lee, Minhyung Lee, Hwa Yeon Ryu, Seran Park, Heungsoo Park, Dae Hong Ko

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Recrystallization and activation of ultra-high-dose phosphorus-implanted silicon using multi-pulse nanosecond laser annealing'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy