Reducing Rext in laser annealed enhancement-mode In 0.53Ga0.47as surface channel n-MOSFET

I. Ok, D. Veksler, P. Y. Hung, J. Oh, R. L. Moore, C. McDonough, R. E. Geer, C. K. Gaspe, M. B. Santos, G. Wong, P. Kirsch, H. H. Tseng, G. Bersuker, C. Hobbs, R. Jammy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

High mobility, narrow band gap group IV and III-V materials are strong contenders to replace strained-Si channels for logic applications beyond the 16 nm node [1-3]. While there are many research efforts evaluating III-V channels in HEMT and MOSFET forms, model based understanding and control of the FET properties such as channel mobility, series resistance, and off-state leakage are still lacking [4-8]. In this work, we address the aforementioned issues, by investigating laser annealing to control thermal budget and lower series resistance. Additionally we also report on preliminary material analysis and demonstrate the low temperature measurement to the performance of In 0.53Ga0.47As MOSFETs. The electrical and material characteristics of TaN/ZrO2/In0.53Ga0.47As self-aligned n-MOSFETs with high Ion/Ioff (> 5×104), high mobility (∼ 3000 cm/V•sec) and promise for low Rext are presented and discussed.

Original languageEnglish
Title of host publicationProceedings of 2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010
Pages38-39
Number of pages2
DOIs
Publication statusPublished - 2010
Event2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010 - Hsin Chu, Taiwan, Province of China
Duration: 2010 Apr 262010 Apr 28

Publication series

NameProceedings of 2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010

Other

Other2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010
CountryTaiwan, Province of China
CityHsin Chu
Period10/4/2610/4/28

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Hardware and Architecture

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