Abstract
The field emission properties and spatial distribution of emission sites for both diamond and graphitic carbon films are investigated. Field emission measurements of diamond films indicated that threshold voltages apparently became lower as nondiamond carbon content increased. It is confirmed that the spatial images of diamond films are not strongly dependent on the morphological change but on the nondiamond content so that the field emission mechanism can be modified by the control of the nondiamond carbon content. The spatial distributions of emission sites for graphitic carbon films have been shown to depend on not the nondiamond carbon content but the thickness and distribution of the sheet.
Original language | English |
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Pages (from-to) | 1035-1039 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 18 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2000 Mar |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering