Relationship between optical properties and microstructure of CeO 2-SiO2 composite thin films

Won Hoe Koo, Soon Moon Jeong, Sang Hun Choi, Hong Koo Baik, Se Jong Lee, Sung Man Lee

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO2 concentration leads to a higher resistance to water absorption.

Original languageEnglish
Pages (from-to)2048-2051
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
Publication statusPublished - 2004 Sep

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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