The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO2 concentration leads to a higher resistance to water absorption.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2004 Sep 1|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films