Relationship between resistive switching and Mott transition in atomic layer deposition prepared La2Ti2O7-x thin film

Yue Wang, Minjae Kim, Akendra Singh Chabungbam, Dong eun Kim, Qingyi Shao, Ioannis Kymissis, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

Abstract

This study prepared Mott-metal state thin film La2Ti2O7-x on TiN substrate using atomic layer deposition, and confirmed W/La2Ti2O7-x/TiN clockwise forming-less resistive switching. The resistive switching mechanism was voltage-driven and oxygen vacancy doping-controlled Mott transition. Positive voltage induces the formation of oxygen vacancy in La2Ti2O7-x and change it from Mott-metal to Mott-insulator state, with the process reversible under negative voltage. We show that N doping can reduce the Ti3+ ratio in La2Ti2O7-x film, producing a weakly correlated system compared with La2Ti2O7-x film without N-doping. Nitrogen doping also increased resistive switching operation voltage and reduced La2Ti2O7-x film on/off ratio. Thus, La2Ti2O7-x, was a promising candidate for the fabrication of resistive switching device based on Mott transition.

Original languageEnglish
Article number115050
JournalScripta Materialia
Volume222
DOIs
Publication statusPublished - 2023 Jan 1

Bibliographical note

Funding Information:
This material is based upon work supported by Creative Materials Discovery Program through the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT ( 2018M3D1A1058536 ). This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. 2019R1A2C2087604 ) and Yue Wang would like to thank the China Scholarship Council (CSC) for financial support. MEST and POSTECH supported the experiments at PLS.

Funding Information:
This material is based upon work supported by Creative Materials Discovery Program through the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT (2018M3D1A1058536). This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. 2019R1A2C2087604) and Yue Wang would like to thank the China Scholarship Council (CSC) for financial support. MEST and POSTECH supported the experiments at PLS.

Publisher Copyright:
© 2022 Acta Materialia Inc.

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys

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