Reliability of MIM HAO capacitor for 70NM DRAM

Kwon Hong, Deok Sin Kil, Hyun Kyung Woo, Joosung Kim, Han Sang Song, Ki Seon Park, Seung Jin Yeom, Hong Seon Yang, Jae Sung Roh, Hyun Chul Sohn, Jin Woong Kim, Sung Wook Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In order to verify the package reliability of MIM HAO capacitor module, mass productive 256M DDR processes with 0.10μm design rule were adopted. The used capacitor dielectrics were HAH and HfxAlyOz and showed Tox.eq of 12Å and Lc of < 0.2fA/cell, respectively. With proper thermal compensation for adjusting the cell Vt, we could get high probe test yield, and high package yield when MIM HAO capacitor was introduced instead of SIS Al2O 3 capacitor. With package samples, refresh time of device did not degrade after IR and EFR stresses and finally, we could confirm the reliability of MIM HAO capacitor in package level through long term test of operation lifetime.

Original languageEnglish
Title of host publication2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual
Pages686-687
Number of pages2
Publication statusPublished - 2005 Dec 15
Event2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual - San Jose, CA, United States
Duration: 2005 Apr 172005 Apr 21

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
ISSN (Print)1541-7026

Other

Other2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual
CountryUnited States
CitySan Jose, CA
Period05/4/1705/4/21

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Hong, K., Kil, D. S., Woo, H. K., Kim, J., Song, H. S., Park, K. S., Yeom, S. J., Yang, H. S., Roh, J. S., Sohn, H. C., Kim, J. W., & Park, S. W. (2005). Reliability of MIM HAO capacitor for 70NM DRAM. In 2005 IEEE International Reliability Physics Symposium Proceedings, 43rd Annual (pp. 686-687). (IEEE International Reliability Physics Symposium Proceedings).