An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality to obtain the replicated micro-optical components with the desired properties by accurate control of the shape. We suggest a simple technique to avoid micro air bubbles. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structures are examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 30 and 230 /im were fabricated by the presented method, and the replication quality and the optical properties of the replicated microlens are measured and analyzed.
|Number of pages||4|
|Journal||Journal of Microlithography, Microfabrication and Microsystems|
|Publication status||Published - 2003|
Bibliographical noteFunding Information:
This research was supported by a grant (M1-02-KN-01-0001-02-K14-01-006-1-0) from the Center for Nanoscale Mechatronics & Manufacturing of 21st Century Frontier Research Program, and the MOCIE (Ministry of Commerce, Industry and Energy) of Korea as a part of the project of development of micro-optical and thermofluidic devices with high functionality.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering