Replication of micro-optical components by ultraviolet-molding process

Seok Min Kim, Dongmook Kim, Shinill Kang

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality to obtain the replicated micro-optical components with the desired properties by accurate control of the shape. We suggest a simple technique to avoid micro air bubbles. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structures are examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 30 and 230 /im were fabricated by the presented method, and the replication quality and the optical properties of the replicated microlens are measured and analyzed.

Original languageEnglish
Pages (from-to)356-359
Number of pages4
JournalJournal of Microlithography, Microfabrication and Microsystems
Volume2
Issue number4
DOIs
Publication statusPublished - 2003

Bibliographical note

Funding Information:
This research was supported by a grant (M1-02-KN-01-0001-02-K14-01-006-1-0) from the Center for Nanoscale Mechatronics & Manufacturing of 21st Century Frontier Research Program, and the MOCIE (Ministry of Commerce, Industry and Energy) of Korea as a part of the project of development of micro-optical and thermofluidic devices with high functionality.

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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