Resonant-frequency tuning of angular vertical comb-driven microscanner

Youngkee Eun, Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.

Original languageEnglish
Article number4
JournalMicro and Nano Systems Letters
Issue number1
Publication statusPublished - 2014 Dec 1

Bibliographical note

Funding Information:
This research was supported by the Center for Integrated Smart Sensors as Global Frontier Project (CISS-2012M3A6A6054201), the Fusion Research Program for Green Technologies (NRF-2010-0019088) through the National Research Foundation of Korea funded by the Ministry of Science, ICT and Future Planning, and the National Research Foundation of Korea Grant (NRF-2012R1A1A2043661) funded by the Korean Government, and supported (in part) by the Yonsei University Research Fund of 2013.

Publisher Copyright:
© 2014, Eun et al.; licensee Springer.

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering


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