Resonant-frequency tuning of angular vertical comb-driven microscanner

Youngkee Eun, Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalLetter

7 Citations (Scopus)

Abstract

The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.

Original languageEnglish
Article number4
JournalMicro and Nano Systems Letters
Volume2
Issue number1
DOIs
Publication statusPublished - 2014 Dec 1

Fingerprint

Natural frequencies
Tuning
Silicon
Electrodes
Electric potential
Bias voltage
Electrostatics
Plastic deformation

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering
  • Biomaterials

Cite this

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abstract = "The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2{\%} when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.",
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Resonant-frequency tuning of angular vertical comb-driven microscanner. / Eun, Youngkee; Kim, Jongbaeg; Lin, Liwei.

In: Micro and Nano Systems Letters, Vol. 2, No. 1, 4, 01.12.2014.

Research output: Contribution to journalLetter

TY - JOUR

T1 - Resonant-frequency tuning of angular vertical comb-driven microscanner

AU - Eun, Youngkee

AU - Kim, Jongbaeg

AU - Lin, Liwei

PY - 2014/12/1

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N2 - The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.

AB - The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.

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