Abstract
The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.
| Original language | English |
|---|---|
| Article number | 4 |
| Journal | Micro and Nano Systems Letters |
| Volume | 2 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2014 Dec 1 |
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All Science Journal Classification (ASJC) codes
- Biomaterials
- Biomedical Engineering
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Resonant-frequency tuning of angular vertical comb-driven microscanner. / Eun, Youngkee; Kim, Jongbaeg; Lin, Liwei.
In: Micro and Nano Systems Letters, Vol. 2, No. 1, 4, 01.12.2014.Research output: Contribution to journal › Letter
TY - JOUR
T1 - Resonant-frequency tuning of angular vertical comb-driven microscanner
AU - Eun, Youngkee
AU - Kim, Jongbaeg
AU - Lin, Liwei
PY - 2014/12/1
Y1 - 2014/12/1
N2 - The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.
AB - The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.
UR - http://www.scopus.com/inward/record.url?scp=84992376937&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84992376937&partnerID=8YFLogxK
U2 - 10.1186/s40486-014-0004-9
DO - 10.1186/s40486-014-0004-9
M3 - Letter
AN - SCOPUS:84992376937
VL - 2
JO - Micro and Nano Systems Letters
JF - Micro and Nano Systems Letters
SN - 2213-9621
IS - 1
M1 - 4
ER -