The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.
Bibliographical noteFunding Information:
This research was supported by the Center for Integrated Smart Sensors as Global Frontier Project (CISS-2012M3A6A6054201), the Fusion Research Program for Green Technologies (NRF-2010-0019088) through the National Research Foundation of Korea funded by the Ministry of Science, ICT and Future Planning, and the National Research Foundation of Korea Grant (NRF-2012R1A1A2043661) funded by the Korean Government, and supported (in part) by the Yonsei University Research Fund of 2013.
All Science Journal Classification (ASJC) codes
- Biomedical Engineering