Resonant frequency tuning of torsional microscanner by mechanical restriction using MEMS actuator

Jae Ik Lee, Park Sunwoo, Eun Youngkee, Jeong Bongwon, Jongbaeg Kim

Research output: Contribution to journalConference article

6 Citations (Scopus)

Abstract

We have demonstrated resonant frequency-tuning of electrostatic torsional microscanners actuated by the staggered vertical comb (SVC) sets. Mechanical restriction unit composed of thermal actuator, scissor mechanism and shaft-holder is used for continuous and reversible resonant frequency tuning. The microscanner and tuning mechanism are fabricated on single crystal silicon of double Silicon-On-Insulator (DSOI) wafer in order to make vertically self-aligned comb sets and electrically insulate the electrostatic microscanner from the thermally actuated tuning unit to prevent charge leakage. The microscanner is actuated at a resonant frequency of 1.698 kHz under driving voltages of 5Vac and 1OVd, without frequency tuning. As the stiffness of a torsional spring is modified gradually through the shaft-holding flexure operated by thermal actuator, the resonant frequency of the torsional microscanner is shifted up to 1.880 kHz showing the maximum tuning ratio of 10.7%.

Original languageEnglish
Article number4805344
Pages (from-to)164-167
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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