Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.
Bibliographical noteFunding Information:
Manuscript received July 31, 2002; revised February 18, 2003. This work was supported in part by Yonsei University Basic Research Fund 2000-1-0176. The review of this letter was arranged by Associate Editor Dr. Arvind Sharma. K.-W. Kim, J.-G. Yook, and H.-K. Park are with the Department of Electrical and Electric Engineering, Yonsei University, Seoul 120-749, Korea (e-mail: email@example.com; firstname.lastname@example.org). M.-G. Gu is with the MEMS Solutions, Inc., Seoul 120-749, Korea. Digital Object Identifier 10.1109/LMWC.2003.815689
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering