Abstract
Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 335-337 |
| Number of pages | 3 |
| Journal | IEEE Microwave and Wireless Components Letters |
| Volume | 13 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 2003 Aug 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
}
Resonator size effects on the TFBAR ladder filter performance. / Kim, Kun Wook; Gu, Myeong Gweon; Yook, Jong Gwan; Park, Han Kyu.
In: IEEE Microwave and Wireless Components Letters, Vol. 13, No. 8, 01.08.2003, p. 335-337.Research output: Contribution to journal › Article
TY - JOUR
T1 - Resonator size effects on the TFBAR ladder filter performance
AU - Kim, Kun Wook
AU - Gu, Myeong Gweon
AU - Yook, Jong Gwan
AU - Park, Han Kyu
PY - 2003/8/1
Y1 - 2003/8/1
N2 - Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.
AB - Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.
UR - http://www.scopus.com/inward/record.url?scp=0141740702&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0141740702&partnerID=8YFLogxK
U2 - 10.1109/LMWC.2003.815689
DO - 10.1109/LMWC.2003.815689
M3 - Article
AN - SCOPUS:0141740702
VL - 13
SP - 335
EP - 337
JO - IEEE Microwave and Wireless Components Letters
JF - IEEE Microwave and Wireless Components Letters
SN - 1531-1309
IS - 8
ER -