Resonator size effects on the TFBAR ladder filter performance

Kun Wook Kim; Myeong Gweon Gu; Jong Gwan Yook; Han Kyu Park

doi:10.1109/LMWC.2003.815689

Resonator size effects on the TFBAR ladder filter performance

Kun Wook Kim, Myeong Gweon Gu, Jong Gwan Yook, Han Kyu Park

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.

Original language	English
Pages (from-to)	335-337
Number of pages	3
Journal	IEEE Microwave and Wireless Components Letters
Volume	13
Issue number	8
DOIs	https://doi.org/10.1109/LMWC.2003.815689
Publication status	Published - 2003 Aug

Bibliographical note

Funding Information:
Manuscript received July 31, 2002; revised February 18, 2003. This work was supported in part by Yonsei University Basic Research Fund 2000-1-0176. The review of this letter was arranged by Associate Editor Dr. Arvind Sharma. K.-W. Kim, J.-G. Yook, and H.-K. Park are with the Department of Electrical and Electric Engineering, Yonsei University, Seoul 120-749, Korea (e-mail: kwkimys@yonsei.ac.kr; jgyook@yonsei.ac.kr). M.-G. Gu is with the MEMS Solutions, Inc., Seoul 120-749, Korea. Digital Object Identifier 10.1109/LMWC.2003.815689

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/LMWC.2003.815689

Cite this

@article{9ebc57d027a741c6b7f45e6ffa725caa,

title = "Resonator size effects on the TFBAR ladder filter performance",

abstract = "Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.",

author = "Kim, {Kun Wook} and Gu, {Myeong Gweon} and Yook, {Jong Gwan} and Park, {Han Kyu}",

note = "Funding Information: Manuscript received July 31, 2002; revised February 18, 2003. This work was supported in part by Yonsei University Basic Research Fund 2000-1-0176. The review of this letter was arranged by Associate Editor Dr. Arvind Sharma. K.-W. Kim, J.-G. Yook, and H.-K. Park are with the Department of Electrical and Electric Engineering, Yonsei University, Seoul 120-749, Korea (e-mail: kwkimys@yonsei.ac.kr; jgyook@yonsei.ac.kr). M.-G. Gu is with the MEMS Solutions, Inc., Seoul 120-749, Korea. Digital Object Identifier 10.1109/LMWC.2003.815689",

year = "2003",

month = aug,

doi = "10.1109/LMWC.2003.815689",

language = "English",

volume = "13",

pages = "335--337",

journal = "IEEE Microwave and Wireless Components Letters",

issn = "1531-1309",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "8",

}

TY - JOUR

T1 - Resonator size effects on the TFBAR ladder filter performance

AU - Kim, Kun Wook

AU - Gu, Myeong Gweon

AU - Yook, Jong Gwan

AU - Park, Han Kyu

N1 - Funding Information: Manuscript received July 31, 2002; revised February 18, 2003. This work was supported in part by Yonsei University Basic Research Fund 2000-1-0176. The review of this letter was arranged by Associate Editor Dr. Arvind Sharma. K.-W. Kim, J.-G. Yook, and H.-K. Park are with the Department of Electrical and Electric Engineering, Yonsei University, Seoul 120-749, Korea (e-mail: kwkimys@yonsei.ac.kr; jgyook@yonsei.ac.kr). M.-G. Gu is with the MEMS Solutions, Inc., Seoul 120-749, Korea. Digital Object Identifier 10.1109/LMWC.2003.815689

PY - 2003/8

Y1 - 2003/8

N2 - Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.

AB - Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.

UR - http://www.scopus.com/inward/record.url?scp=0141740702&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0141740702&partnerID=8YFLogxK

U2 - 10.1109/LMWC.2003.815689

DO - 10.1109/LMWC.2003.815689

M3 - Article

AN - SCOPUS:0141740702

VL - 13

SP - 335

EP - 337

JO - IEEE Microwave and Wireless Components Letters

JF - IEEE Microwave and Wireless Components Letters

SN - 1531-1309

IS - 8

ER -

Resonator size effects on the TFBAR ladder filter performance

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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