Reversible and continuous latching using a carbon internanotube interface

Youngkee Eun, Jungwook Choi, Jae Ik Lee, Hyungjoo Na, Dae Hyun Baek, Min Ook Kim, Jongbaeg Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Mechanical multistability is greatly beneficial in microelectromechanical systems because it offers multiple stable positioning of movable microstructures without a continuous energy supply. Although mechanical latching components based on multistability have been widely used in microsystems, their latching positions are inherently discrete and the number of stable positions is quite limited because of the lithographical minimum feature size limit of microstructures. We report a novel use of aligned carbon nanotube (CNT) arrays as latching elements in a movable micromechanical device. This CNT-array-based latching mechanism allows stable latching at multiple latching positions, together with reversible and bidirectional latching capabilities. The latching element with integrated CNTs on the sidewalls of microstructures can be adopted for diverse microelectromechanical systems that need precise positioning of movable structures without the necessity of continuous power consumption.

Original languageEnglish
Pages (from-to)7465-7469
Number of pages5
JournalACS Applied Materials and Interfaces
Volume5
Issue number15
DOIs
Publication statusPublished - 2013 Aug 14

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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