Review on optical and electrical properties of oxide semiconductors

Dong Lim Kim, Hyun Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Oxide semiconductors became one of the potential elements for large area electronics such as a channel for thin film transistors. Optical and electrical properties were modified by alloying or doping of several oxide materials; In2O3, ZnO, Ga2O3, and SnO 2. The excellent properties achieved at the ternary or quaternary alloys could be explained by the role of each materials as a carrier controller, a conduction path, and etc. The metal oxide semiconductors were generally deposited by vacuum process but recently, alternative ways, like a sol-gel or an ink-jet printing, are suggested. In this review, diverse approaches on oxide semiconductors are shown, and an in-depth discussion of the optical and electrical properties alternation in metal oxide alloy fabricated by various methods is given.

Original languageEnglish
Title of host publicationOxide-based Materials and Devices
DOIs
Publication statusPublished - 2010 May 7
EventOxide-based Materials and Devices - San Francisco, CA, United States
Duration: 2010 Jan 242010 Jan 27

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7603
ISSN (Print)0277-786X

Other

OtherOxide-based Materials and Devices
CountryUnited States
CitySan Francisco, CA
Period10/1/2410/1/27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Kim, D. L., & Kim, H. J. (2010). Review on optical and electrical properties of oxide semiconductors. In Oxide-based Materials and Devices [760313] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7603). https://doi.org/10.1117/12.846661