The deposition power dependence of visible transmittance and refractive index of room temperature-deposited ZnO:Al thin films by RF magnetron sputtering has been studied. All films exhibited high visible transmittance and near-complete UV absorption. The refractive index of the films decreased continuously with an increase in the RF power at all photon energies in the visible and near-IR region, which has been partially attributed to the decreased packing density of the films. For each film, the refractive index exhibited strong frequency dispersion in the weak-absorption region. The origin of optical dispersion at different RF power has been discussed in the light of a single-oscillator model.
|Number of pages||5|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - 2014 Apr|
Bibliographical noteFunding Information:
This work was financially supported by the Converging Research Center Program (2012K001270) and by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MEST) (2011-0020285).
All Science Journal Classification (ASJC) codes
- Materials Science(all)