Robust design of a novel three-axis fine stage for precision positioning in lithography

D. J. Lee, K. Kim, K. N. Lee, H. G. Choi, N. C. Park, Y. P. Park, M. G. Lee

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The precision positioning system for semiconductor lithography requires a robust structural design to obtain enough control bandwidth and an efficient actuator with fast access time. In this article, a three-axis stage is proposed as a fine stage of a dual stage for the precision positioning. Its actuators are voice coil motors (VCMs) whose coil windings are mounted on the coarse stage and its magnets are on the fine stage. Between the fine and coarse stages, there is no mechanical connection but only magnetic coupling. The eight pairs of magnets and four coil windings are arrayed symmetrically. The three-axis stage's dynamic characteristics are improved by enhancing the actuating force and modifying its own structure using finite-element analysis in order to meet its requirements of high bandwidth and large forces. The actuating force is strengthened by modifying each VCM's magnetic circuit. The structure is designed to be robust by using design of experiment (DOE) as well. The modified stage is verified to have enough dynamic characteristics through experiments.

Original languageEnglish
Pages (from-to)877-888
Number of pages12
JournalProceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
Volume224
Issue number4
DOIs
Publication statusPublished - 2010 Jan 1

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Lithography
Magnets
Actuators
Bandwidth
Magnetic couplings
Magnetic circuits
Structural design
Design of experiments
Semiconductor materials
Finite element method
Experiments

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

@article{a80fbc831a9940dfb0cecf065edf2c0d,
title = "Robust design of a novel three-axis fine stage for precision positioning in lithography",
abstract = "The precision positioning system for semiconductor lithography requires a robust structural design to obtain enough control bandwidth and an efficient actuator with fast access time. In this article, a three-axis stage is proposed as a fine stage of a dual stage for the precision positioning. Its actuators are voice coil motors (VCMs) whose coil windings are mounted on the coarse stage and its magnets are on the fine stage. Between the fine and coarse stages, there is no mechanical connection but only magnetic coupling. The eight pairs of magnets and four coil windings are arrayed symmetrically. The three-axis stage's dynamic characteristics are improved by enhancing the actuating force and modifying its own structure using finite-element analysis in order to meet its requirements of high bandwidth and large forces. The actuating force is strengthened by modifying each VCM's magnetic circuit. The structure is designed to be robust by using design of experiment (DOE) as well. The modified stage is verified to have enough dynamic characteristics through experiments.",
author = "Lee, {D. J.} and K. Kim and Lee, {K. N.} and Choi, {H. G.} and Park, {N. C.} and Park, {Y. P.} and Lee, {M. G.}",
year = "2010",
month = "1",
day = "1",
doi = "10.1243/09544062JMES1570",
language = "English",
volume = "224",
pages = "877--888",
journal = "Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science",
issn = "0954-4062",
publisher = "SAGE Publications Ltd",
number = "4",

}

Robust design of a novel three-axis fine stage for precision positioning in lithography. / Lee, D. J.; Kim, K.; Lee, K. N.; Choi, H. G.; Park, N. C.; Park, Y. P.; Lee, M. G.

In: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 224, No. 4, 01.01.2010, p. 877-888.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Robust design of a novel three-axis fine stage for precision positioning in lithography

AU - Lee, D. J.

AU - Kim, K.

AU - Lee, K. N.

AU - Choi, H. G.

AU - Park, N. C.

AU - Park, Y. P.

AU - Lee, M. G.

PY - 2010/1/1

Y1 - 2010/1/1

N2 - The precision positioning system for semiconductor lithography requires a robust structural design to obtain enough control bandwidth and an efficient actuator with fast access time. In this article, a three-axis stage is proposed as a fine stage of a dual stage for the precision positioning. Its actuators are voice coil motors (VCMs) whose coil windings are mounted on the coarse stage and its magnets are on the fine stage. Between the fine and coarse stages, there is no mechanical connection but only magnetic coupling. The eight pairs of magnets and four coil windings are arrayed symmetrically. The three-axis stage's dynamic characteristics are improved by enhancing the actuating force and modifying its own structure using finite-element analysis in order to meet its requirements of high bandwidth and large forces. The actuating force is strengthened by modifying each VCM's magnetic circuit. The structure is designed to be robust by using design of experiment (DOE) as well. The modified stage is verified to have enough dynamic characteristics through experiments.

AB - The precision positioning system for semiconductor lithography requires a robust structural design to obtain enough control bandwidth and an efficient actuator with fast access time. In this article, a three-axis stage is proposed as a fine stage of a dual stage for the precision positioning. Its actuators are voice coil motors (VCMs) whose coil windings are mounted on the coarse stage and its magnets are on the fine stage. Between the fine and coarse stages, there is no mechanical connection but only magnetic coupling. The eight pairs of magnets and four coil windings are arrayed symmetrically. The three-axis stage's dynamic characteristics are improved by enhancing the actuating force and modifying its own structure using finite-element analysis in order to meet its requirements of high bandwidth and large forces. The actuating force is strengthened by modifying each VCM's magnetic circuit. The structure is designed to be robust by using design of experiment (DOE) as well. The modified stage is verified to have enough dynamic characteristics through experiments.

UR - http://www.scopus.com/inward/record.url?scp=77951668070&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77951668070&partnerID=8YFLogxK

U2 - 10.1243/09544062JMES1570

DO - 10.1243/09544062JMES1570

M3 - Article

AN - SCOPUS:77951668070

VL - 224

SP - 877

EP - 888

JO - Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

JF - Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

SN - 0954-4062

IS - 4

ER -