Role of alumina buffer layer on the dielectric and piezoelectric properties of PZT system thick films

Tae Hee Shin, Jong Yoon Ha, Hyun Cheol Song, Seok Jin Yoon, Seong Ju Hwang, Sahn Nahm, Hyung Ho Park, Ji Won Choi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Piezoelectric properties of screen-printed thick films, 0.01Pb(Mg 1/2W1/2)O3-0.41Pb(Ni1/3Nb 2/3)O3-0.35PbTiO3-0.23PbZrO3 + 0.1 wt% Y2O3 + 1.5 wt% ZnO (PMW-PNN-PT-PZ+YZ) on alumina (Al2O3) buffer layers deposited on Si substrates, were studied. To improve piezoelectric properties of and integrate the PMW-PNN-PT-PZ+YZ thick films, the Al2O3 buffer layers on silicon (Si) substrates were used. The Al2O3 buffer layer on the Si substrate suppressed the pyrochlore phases of the piezoelectric thick films and prevented interdiffusion of Si and Pb. The PMW-PNN-PT-PZ+YZ thick films with 900 nm thick Al2O3 buffer layer showed piezoelectric properties such as Pr = 32 μC/cm2, E c = 25 kV/cm, and d33 = 32 pC/N. These significant piezoelectric properties of our screen-printed PMW-PNN-PT-PZ+YZ thick films by the Al2O3 buffer layers can be applied to functional thick film in many micro-electromechanical system (MEMS) applications such as micro actuators and sensors.

Original languageEnglish
Pages (from-to)491-495
Number of pages5
JournalJournal of the American Ceramic Society
Volume96
Issue number2
DOIs
Publication statusPublished - 2013 Feb 1

Fingerprint

Aluminum Oxide
Buffer layers
Thick films
aluminum oxide
Alumina
Silicon
silicon
substrate
Substrates
pyrochlore
MEMS
Actuators
sensor
Sensors

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Geology
  • Geochemistry and Petrology
  • Materials Chemistry

Cite this

Shin, Tae Hee ; Ha, Jong Yoon ; Song, Hyun Cheol ; Yoon, Seok Jin ; Hwang, Seong Ju ; Nahm, Sahn ; Park, Hyung Ho ; Choi, Ji Won. / Role of alumina buffer layer on the dielectric and piezoelectric properties of PZT system thick films. In: Journal of the American Ceramic Society. 2013 ; Vol. 96, No. 2. pp. 491-495.
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Role of alumina buffer layer on the dielectric and piezoelectric properties of PZT system thick films. / Shin, Tae Hee; Ha, Jong Yoon; Song, Hyun Cheol; Yoon, Seok Jin; Hwang, Seong Ju; Nahm, Sahn; Park, Hyung Ho; Choi, Ji Won.

In: Journal of the American Ceramic Society, Vol. 96, No. 2, 01.02.2013, p. 491-495.

Research output: Contribution to journalArticle

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AU - Shin, Tae Hee

AU - Ha, Jong Yoon

AU - Song, Hyun Cheol

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AU - Nahm, Sahn

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