A room-temperature imprint lithography based on plastic flow along with free-volume contraction and plastic deformation of the resist layer is demonstrated. In this method, the thermoplastic resist layer is pressed by a mold at room temperature, without heating or any surface treatment of either the mold or the resist. This method has the unique features of enabling step-and-repeat and multiple imprinting.
|Number of pages||4|
|Publication status||Published - 2001 May 17|
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering