Room-temperature imprint lithography

D. Y. Khang, H. Yoon, H. H. Lee

Research output: Contribution to journalArticle

104 Citations (Scopus)

Abstract

A room-temperature imprint lithography based on plastic flow along with free-volume contraction and plastic deformation of the resist layer is demonstrated. In this method, the thermoplastic resist layer is pressed by a mold at room temperature, without heating or any surface treatment of either the mold or the resist. This method has the unique features of enabling step-and-repeat and multiple imprinting.

Original languageEnglish
Pages (from-to)749-752
Number of pages4
JournalAdvanced Materials
Volume13
Issue number10
DOIs
Publication statusPublished - 2001 May 17

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this