Room-temperature imprint lithography

D. Y. Khang, H. Yoon, H. H. Lee

Research output: Contribution to journalArticle

104 Citations (Scopus)

Abstract

A room-temperature imprint lithography based on plastic flow along with free-volume contraction and plastic deformation of the resist layer is demonstrated. In this method, the thermoplastic resist layer is pressed by a mold at room temperature, without heating or any surface treatment of either the mold or the resist. This method has the unique features of enabling step-and-repeat and multiple imprinting.

Original languageEnglish
Pages (from-to)749-752
Number of pages4
JournalAdvanced Materials
Volume13
Issue number10
DOIs
Publication statusPublished - 2001 May 17

Fingerprint

Lithography
Free volume
Plastic flow
Thermoplastics
Surface treatment
Plastic deformation
Heating
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Khang, D. Y. ; Yoon, H. ; Lee, H. H. / Room-temperature imprint lithography. In: Advanced Materials. 2001 ; Vol. 13, No. 10. pp. 749-752.
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Room-temperature imprint lithography. / Khang, D. Y.; Yoon, H.; Lee, H. H.

In: Advanced Materials, Vol. 13, No. 10, 17.05.2001, p. 749-752.

Research output: Contribution to journalArticle

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AU - Khang, D. Y.

AU - Yoon, H.

AU - Lee, H. H.

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AB - A room-temperature imprint lithography based on plastic flow along with free-volume contraction and plastic deformation of the resist layer is demonstrated. In this method, the thermoplastic resist layer is pressed by a mold at room temperature, without heating or any surface treatment of either the mold or the resist. This method has the unique features of enabling step-and-repeat and multiple imprinting.

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