Roughness and pore structure control of ordered mesoporous silica films for the enhancement of electrical properties

Sang Bae Jung, Tae Jung Ha, Hyung Ho Park

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Mesostructured silica films with a well-ordered Im3m structure and enhanced surface properties can be synthesized by means of cosolvent addition and the optimization of sol aging time. Mesostructured silica films fabricated using ethanol, a commercial solvent, result in wavy surface properties induced by the Marangoni effect irrespective of rotation speed during spin coating. In order to improve the surface roughness, we used an ethanol-acetone mixture as a solvent with a certain molar ratio. Wavy and rough films could be avoided when the acetone molar ratio was optimized. The simultaneous increase of unit cell size and thickness of the film was observed when the amount of cosolvent was increased. The unit cell was also enlarged with sol aging time, and well-ordered mesoporous silica films could be synthesized by controlling the silica sol aging. The dielectric property could be improved by means of cosolvent addition only after the development of a highly ordered mesoporous nature of the film by calcination. The leakage current of the mesoporous silica film could be reduced when the structural ordering and surface roughness were controlled.

Original languageEnglish
Article number024109
JournalJournal of Applied Physics
Volume101
Issue number2
DOIs
Publication statusPublished - 2007 Mar 14

Fingerprint

roughness
electrical properties
silicon dioxide
porosity
augmentation
surface properties
acetone
surface roughness
ethyl alcohol
cells
roasting
coating
dielectric properties
leakage
optimization

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

@article{286164d7f94d42e2bc6b2a3e7ea04977,
title = "Roughness and pore structure control of ordered mesoporous silica films for the enhancement of electrical properties",
abstract = "Mesostructured silica films with a well-ordered Im3m structure and enhanced surface properties can be synthesized by means of cosolvent addition and the optimization of sol aging time. Mesostructured silica films fabricated using ethanol, a commercial solvent, result in wavy surface properties induced by the Marangoni effect irrespective of rotation speed during spin coating. In order to improve the surface roughness, we used an ethanol-acetone mixture as a solvent with a certain molar ratio. Wavy and rough films could be avoided when the acetone molar ratio was optimized. The simultaneous increase of unit cell size and thickness of the film was observed when the amount of cosolvent was increased. The unit cell was also enlarged with sol aging time, and well-ordered mesoporous silica films could be synthesized by controlling the silica sol aging. The dielectric property could be improved by means of cosolvent addition only after the development of a highly ordered mesoporous nature of the film by calcination. The leakage current of the mesoporous silica film could be reduced when the structural ordering and surface roughness were controlled.",
author = "Jung, {Sang Bae} and Ha, {Tae Jung} and Park, {Hyung Ho}",
year = "2007",
month = "3",
day = "14",
doi = "10.1063/1.2424405",
language = "English",
volume = "101",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "2",

}

Roughness and pore structure control of ordered mesoporous silica films for the enhancement of electrical properties. / Jung, Sang Bae; Ha, Tae Jung; Park, Hyung Ho.

In: Journal of Applied Physics, Vol. 101, No. 2, 024109, 14.03.2007.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Roughness and pore structure control of ordered mesoporous silica films for the enhancement of electrical properties

AU - Jung, Sang Bae

AU - Ha, Tae Jung

AU - Park, Hyung Ho

PY - 2007/3/14

Y1 - 2007/3/14

N2 - Mesostructured silica films with a well-ordered Im3m structure and enhanced surface properties can be synthesized by means of cosolvent addition and the optimization of sol aging time. Mesostructured silica films fabricated using ethanol, a commercial solvent, result in wavy surface properties induced by the Marangoni effect irrespective of rotation speed during spin coating. In order to improve the surface roughness, we used an ethanol-acetone mixture as a solvent with a certain molar ratio. Wavy and rough films could be avoided when the acetone molar ratio was optimized. The simultaneous increase of unit cell size and thickness of the film was observed when the amount of cosolvent was increased. The unit cell was also enlarged with sol aging time, and well-ordered mesoporous silica films could be synthesized by controlling the silica sol aging. The dielectric property could be improved by means of cosolvent addition only after the development of a highly ordered mesoporous nature of the film by calcination. The leakage current of the mesoporous silica film could be reduced when the structural ordering and surface roughness were controlled.

AB - Mesostructured silica films with a well-ordered Im3m structure and enhanced surface properties can be synthesized by means of cosolvent addition and the optimization of sol aging time. Mesostructured silica films fabricated using ethanol, a commercial solvent, result in wavy surface properties induced by the Marangoni effect irrespective of rotation speed during spin coating. In order to improve the surface roughness, we used an ethanol-acetone mixture as a solvent with a certain molar ratio. Wavy and rough films could be avoided when the acetone molar ratio was optimized. The simultaneous increase of unit cell size and thickness of the film was observed when the amount of cosolvent was increased. The unit cell was also enlarged with sol aging time, and well-ordered mesoporous silica films could be synthesized by controlling the silica sol aging. The dielectric property could be improved by means of cosolvent addition only after the development of a highly ordered mesoporous nature of the film by calcination. The leakage current of the mesoporous silica film could be reduced when the structural ordering and surface roughness were controlled.

UR - http://www.scopus.com/inward/record.url?scp=33847695830&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847695830&partnerID=8YFLogxK

U2 - 10.1063/1.2424405

DO - 10.1063/1.2424405

M3 - Article

AN - SCOPUS:33847695830

VL - 101

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 2

M1 - 024109

ER -