Ru nanodot synthesis using CO2 supercritical fluid deposition

Doyoung Kim, Han Bo Ram Lee, Jaehong Yoon, Hyungjun Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

CO2-based supercritical fluid deposition (SCFD) was utilized for the synthesis of ruthenium nanostructures on Si substrates and hafnium oxide (HfO2) films. Ru nanodots were formed by the reduction of a Ru precursor under a hydrogen environment. Ruthenium carbonyl was dissolved in supercritical CO2 in a pre-mix vessel, and this mixture was pumped into a reaction vessel which allowed it to undergo rapid expansion. The formation of Ru nanodots was studied as a function of key process parameters such as the weight of precursor used, the reaction temperature and the H 2 reactant pressure. Utilizing the Ru nanodots on a HfO2 control oxide, a flash memory device containing nanodots was fabricated and its memory characteristics were demonstrated.

Original languageEnglish
Pages (from-to)664-667
Number of pages4
JournalJournal of Physics and Chemistry of Solids
Volume74
Issue number5
DOIs
Publication statusPublished - 2013 May 1

Fingerprint

Supercritical fluids
Ruthenium
supercritical fluids
ruthenium
vessels
Hafnium oxides
hafnium oxides
Data storage equipment
oxides
Flash memory
synthesis
Oxides
Oxide films
flash
oxide films
Hydrogen
Nanostructures
expansion
Substrates
hydrogen

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Kim, Doyoung ; Lee, Han Bo Ram ; Yoon, Jaehong ; Kim, Hyungjun. / Ru nanodot synthesis using CO2 supercritical fluid deposition. In: Journal of Physics and Chemistry of Solids. 2013 ; Vol. 74, No. 5. pp. 664-667.
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Ru nanodot synthesis using CO2 supercritical fluid deposition. / Kim, Doyoung; Lee, Han Bo Ram; Yoon, Jaehong; Kim, Hyungjun.

In: Journal of Physics and Chemistry of Solids, Vol. 74, No. 5, 01.05.2013, p. 664-667.

Research output: Contribution to journalArticle

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