Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

Woo Hee Kim, Sang Joon Park, Jong Yeog Son, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

97 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition'. Together they form a unique fingerprint.

Engineering

Agricultural and Biological Sciences

Physics

Material Science