Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition

Woo Hee Kim, Sang Joon Park, Jong Yeog Son, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

91 Citations (Scopus)

Fingerprint Dive into the research topics of 'Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science