SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

J. G. Kim, T. J. Lee, N. C. Park, Y. P. Park, K. S. Park

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described.

Original languageEnglish
Pages (from-to)204-211
Number of pages8
JournalSensors and Actuators, A: Physical
Volume189
DOIs
Publication statusPublished - 2013 Jan 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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