Controlled synthesis and integration of carbon nanotubes (CNTs) remain important areas of study to develop practical carbon-based nanodevices. A method of controlling the number of CNTs synthesized depending on the size of the catalyst was characterized using nanostencil lithography, and the critical dimension for the nanoaperture produced on a stencil mask used for growing individual CNTs was studied. The stencil mask was fabricated as a nanoaperture array down to 40 nm in diameter on a low-stress silicon nitride membrane. An iron catalyst used to synthesize CNTs was deposited through submicron patterns in the stencil mask onto a silicon substrate, and the profile of the patterned iron catalyst was analyzed using atomic force microscopy. The feasibility toward a scalable, number-, and location-controlled synthesis of CNTs was experimentally demonstrated based on the diameter and geometry of the apertures in the stencil mask.
Bibliographical noteFunding Information:
This research was supported by the Basic Science Research Program (313-2008-2-D00084), the Smart IT Convergence System Research Center as Global Frontier Project (2011–0031870), and the Converging Research Center Program (2012 K001484) through the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science, and Technology.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics