Scalable and number-controlled synthesis of carbon nanotubes by nanostencil lithography

Jungwook Choi, Kisik Koh, Jongbaeg Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Controlled synthesis and integration of carbon nanotubes (CNTs) remain important areas of study to develop practical carbon-based nanodevices. A method of controlling the number of CNTs synthesized depending on the size of the catalyst was characterized using nanostencil lithography, and the critical dimension for the nanoaperture produced on a stencil mask used for growing individual CNTs was studied. The stencil mask was fabricated as a nanoaperture array down to 40 nm in diameter on a low-stress silicon nitride membrane. An iron catalyst used to synthesize CNTs was deposited through submicron patterns in the stencil mask onto a silicon substrate, and the profile of the patterned iron catalyst was analyzed using atomic force microscopy. The feasibility toward a scalable, number-, and location-controlled synthesis of CNTs was experimentally demonstrated based on the diameter and geometry of the apertures in the stencil mask.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalNanoscale Research Letters
Volume8
Issue number1
DOIs
Publication statusPublished - 2013 Aug 13

Fingerprint

Carbon Nanotubes
Lithography
Carbon nanotubes
lithography
carbon nanotubes
Masks
masks
synthesis
catalysts
Catalysts
Iron
iron
Silicon
Silicon nitride
silicon nitrides
Atomic force microscopy
Carbon
apertures
atomic force microscopy
membranes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

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Scalable and number-controlled synthesis of carbon nanotubes by nanostencil lithography. / Choi, Jungwook; Koh, Kisik; Kim, Jongbaeg.

In: Nanoscale Research Letters, Vol. 8, No. 1, 13.08.2013, p. 1-7.

Research output: Contribution to journalArticle

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