ZnO nanodots were prepared by selective area atomic layer deposition (SA-ALD) on an octadecyltrichlorosilane (ODTS) self-assembly monolayers (SAMs) patterns formed using a diblock co-polymer (DBC) nanotemplate. In order to transfer well-ordered nanaotemplate in SAMs, SiO 2 sacrificial layer was inserted between DBC and SAMs. Cylindrical nanoholes under 16 nm diameters were wellformed on SiO 2 layer. SA-ALD of ZnO was successfully performed on by ODTS SAMs.
All Science Journal Classification (ASJC) codes
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics