Selective area growth of Bernal bilayer epitaxial graphene on 4H-SiC (0001) substrate by electron-beam irradiation

P. Dharmaraj, K. Jeganathan, S. Parthiban, Jang-Yeon Kwon, S. Gautam, K. H. Chae, K. Asokan

Research output: Contribution to journalArticle

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Abstract

We report selective area growth of large area homogeneous Bernal stacked bilayer epitaxial graphene (BLEG) on 4H-SiC (0001) substrate by electron-beam irradiation. Sublimation of Si occurs by energetic electron irradiations on SiC surface via breaking of Si-C bonds in the localized region, which allows the selective growth of graphene. Raman measurements ensure the formation of homogeneous BLEG with weak compressive strain of -0.08%. The carrier mobility of large area BLEG is ∼5100cm2V-1s-1 with a sheet carrier density of 2.2×1013cm-2. Current-voltage measurements reveal that BLEG on 4H-SiC forms a Schottky junction with an operation at mA level. Our study reveals that the barrier height at the Schottky junction is low (∼0.58eV) due to the Fermi-level pinning above the Dirac point.

Original languageEnglish
Article number181601
JournalApplied Physics Letters
Volume105
Issue number18
DOIs
Publication statusPublished - 2014 Nov 3

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graphene
electron beams
irradiation
electron irradiation
carrier mobility
sublimation
electrical measurement

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Dharmaraj, P. ; Jeganathan, K. ; Parthiban, S. ; Kwon, Jang-Yeon ; Gautam, S. ; Chae, K. H. ; Asokan, K. / Selective area growth of Bernal bilayer epitaxial graphene on 4H-SiC (0001) substrate by electron-beam irradiation. In: Applied Physics Letters. 2014 ; Vol. 105, No. 18.
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Selective area growth of Bernal bilayer epitaxial graphene on 4H-SiC (0001) substrate by electron-beam irradiation. / Dharmaraj, P.; Jeganathan, K.; Parthiban, S.; Kwon, Jang-Yeon; Gautam, S.; Chae, K. H.; Asokan, K.

In: Applied Physics Letters, Vol. 105, No. 18, 181601, 03.11.2014.

Research output: Contribution to journalArticle

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AU - Dharmaraj, P.

AU - Jeganathan, K.

AU - Parthiban, S.

AU - Kwon, Jang-Yeon

AU - Gautam, S.

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AU - Asokan, K.

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