Selective epitaxial growth of GaAs on a Si (001) surface formed by an in situ bake in a metal-organic chemical vapor deposition reactor

Young Dae Cho, In Geun Lee, Mi Jin Jung, Hyunsu Shin, Dong Hwan Jun, Chan Soo Shin, Kyung Ho Park, Won Kyu Park, Dae Hyun Kim, Dae Hong Ko

Research output: Contribution to journal › Article › peer-review

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Engineering & Materials Science

Chemistry

Physics & Astronomy