Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition

Sang Woo Kim; Teruhisa Kotani; Masaya Ueda; Shizuo Fujita; Shigeo Fujita

doi:10.1063/1.1622795

Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition

Sang Woo Kim, Teruhisa Kotani, Masaya Ueda, Shizuo Fujita, Shigeo Fujita

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The selective formation of zinc oxide (ZnO) nanodots on nanopatterned SiO₂/Si substrates was discussed. The nanodots were formed by metalorganic vapor deposition. The nanodots were formed in nanopatterned lines by etching of SiO₂ with focused ion beam (FIB). The results showed that the emission originated from the selectively grown ZnO nanodots.

Original language	English
Pages (from-to)	3593-3595
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	17
DOIs	https://doi.org/10.1063/1.1622795
Publication status	Published - 2003 Oct 27

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1622795

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title = "Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition",

abstract = "The selective formation of zinc oxide (ZnO) nanodots on nanopatterned SiO2/Si substrates was discussed. The nanodots were formed by metalorganic vapor deposition. The nanodots were formed in nanopatterned lines by etching of SiO2 with focused ion beam (FIB). The results showed that the emission originated from the selectively grown ZnO nanodots.",

author = "Kim, {Sang Woo} and Teruhisa Kotani and Masaya Ueda and Shizuo Fujita and Shigeo Fujita",

year = "2003",

month = oct,

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AU - Kim, Sang Woo

AU - Kotani, Teruhisa

AU - Ueda, Masaya

AU - Fujita, Shizuo

AU - Fujita, Shigeo

PY - 2003/10/27

Y1 - 2003/10/27

N2 - The selective formation of zinc oxide (ZnO) nanodots on nanopatterned SiO2/Si substrates was discussed. The nanodots were formed by metalorganic vapor deposition. The nanodots were formed in nanopatterned lines by etching of SiO2 with focused ion beam (FIB). The results showed that the emission originated from the selectively grown ZnO nanodots.

AB - The selective formation of zinc oxide (ZnO) nanodots on nanopatterned SiO2/Si substrates was discussed. The nanodots were formed by metalorganic vapor deposition. The nanodots were formed in nanopatterned lines by etching of SiO2 with focused ion beam (FIB). The results showed that the emission originated from the selectively grown ZnO nanodots.

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Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition

Abstract

All Science Journal Classification (ASJC) codes

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