The facile sonochemical method has been used to selectively grow a ZnO nanorods sensing layer directly on an alumina substrate. The growth region of the ZnO nanorods array is precisely controlled by a pre-coated Pt/Zn seed layer on alumina substrate. No growth of ZnO nanostructure is found on the substrate without seed layer. The grown ZnO nanorods are well aligned and densely packed, with wurtzite crystal structure and flat hexagonal tip. The sensing properties of the obtained ZnO nanorods sensing layer to three kinds of toxic gases (NH 3, CO, and CH 4) have been investigated. The sensing observation revealed that the selectively grown ZnO nanorods demonstrated good response, repeatability, and excellent linearity toward toxic gases. This result indicates that selective growth of ZnO nanorods directly on sensor substrate is an accessible and advantageous method for sensor fabrication.
Bibliographical noteFunding Information:
Manuscript received June 30, 2011; revised July 20, 2012; accepted July 24, 2012. Date of publication August 1, 2012; date of current version October 4, 2012. This work was supported by the National Research Foundation of Korea through the Converging Research Center Program funded by the Ministry of Education, Science, and Technology under Grant 2012K001351 and Grant 2012K001353. The associate editor coordinating the review of this paper and approving it for publication was Prof. Michael J. Vellekoop.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering