Selective laser activation process for indium gallium zinc oxide thin film transistors

Jeong Woo Park, Won Gi Kim, Byung Ha Kang, I. Sak Lee, Hyun Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed high-energy green laser irradiation as a new technique for the activation of amorphous indium gallium zinc oxide thin film transistors (a-IGZO TFTs). Compared with IGZO TFTs fabricated at 300°C, green laser-activated IGZO TFTs without any thermal annealing process showed superior characteristics: field effect mobility of 6.88 cm2/Vs, subthreshold swing of 0.29 V/dec, and on/off ratio of 6.95 x 109. Although a-IGZO films are hardly absorb green laser due to large bandgap (> 3 eV), a-IGZO TFTs could be activated by selective heat absorption only for gate, source, and drain metal electrodes with selective green laser irradiation. The thermal energy converted by the laser irradiation selectively activated the channel layer without thermal damage on substrates.

Original languageEnglish
Title of host publicationDigest of Technical Papers - SID International Symposium
PublisherBlackwell Publishing Ltd.
Pages1288-1291
Number of pages4
Edition1
ISBN (Print)9781510867659, 9781510867659, 9781510867659
DOIs
Publication statusPublished - 2018 Jan 1
EventSID Symposium, Seminar, and Exhibition 2018, Display Week 2018 - Los Angeles, United States
Duration: 2018 May 202018 May 25

Publication series

NameDigest of Technical Papers - SID International Symposium
Number1
Volume49
ISSN (Print)0097-966X
ISSN (Electronic)2168-0159

Other

OtherSID Symposium, Seminar, and Exhibition 2018, Display Week 2018
CountryUnited States
CityLos Angeles
Period18/5/2018/5/25

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Park, J. W., Kim, W. G., Kang, B. H., Lee, I. S., & Kim, H. J. (2018). Selective laser activation process for indium gallium zinc oxide thin film transistors. In Digest of Technical Papers - SID International Symposium (1 ed., pp. 1288-1291). (Digest of Technical Papers - SID International Symposium; Vol. 49, No. 1). Blackwell Publishing Ltd.. https://doi.org/10.1002/sdtp.12453