Selective stiction based vertical comb actuators

Jongbaeg Kim, Dane Christensen, Liwei Lin

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single crystalline silicon with self-aligned comb-sets. The fabrication process with optimal designs of mechanical springs enables the stiction of microstructures in a controlled manner and significantly reduces unwanted compliances on the actuators, preventing unwarranted motion and providing stable operations. The prototype microactuators operate at a resonant frequency around 0.92kHz with 85 degrees optical scanning angle and quality factor of 162 in air under driving voltages of 19V dc plus 15V pp. Applications to scanning micromirrors, optical switches, and variable capacitors are a few of the MEMS uses; we present results obtained with MEMS mirrors.

Original languageEnglish
Article numberTPa40
Pages (from-to)403-406
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005 Oct 25

Fingerprint

stiction
Stiction
microelectromechanical systems
MEMS
Actuators
actuators
Scanning
Fabrication
Microactuators
fabrication
scanning
Optical switches
Silicon
resonant frequencies
Q factors
Natural frequencies
capacitors
Capacitors
switches
prototypes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{f0b9c29f23df4f6eb1b32c9690449620,
title = "Selective stiction based vertical comb actuators",
abstract = "Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single crystalline silicon with self-aligned comb-sets. The fabrication process with optimal designs of mechanical springs enables the stiction of microstructures in a controlled manner and significantly reduces unwanted compliances on the actuators, preventing unwarranted motion and providing stable operations. The prototype microactuators operate at a resonant frequency around 0.92kHz with 85 degrees optical scanning angle and quality factor of 162 in air under driving voltages of 19V dc plus 15V pp. Applications to scanning micromirrors, optical switches, and variable capacitors are a few of the MEMS uses; we present results obtained with MEMS mirrors.",
author = "Jongbaeg Kim and Dane Christensen and Liwei Lin",
year = "2005",
month = "10",
day = "25",
language = "English",
pages = "403--406",
journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
issn = "1084-6999",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

Selective stiction based vertical comb actuators. / Kim, Jongbaeg; Christensen, Dane; Lin, Liwei.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 25.10.2005, p. 403-406.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Selective stiction based vertical comb actuators

AU - Kim, Jongbaeg

AU - Christensen, Dane

AU - Lin, Liwei

PY - 2005/10/25

Y1 - 2005/10/25

N2 - Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single crystalline silicon with self-aligned comb-sets. The fabrication process with optimal designs of mechanical springs enables the stiction of microstructures in a controlled manner and significantly reduces unwanted compliances on the actuators, preventing unwarranted motion and providing stable operations. The prototype microactuators operate at a resonant frequency around 0.92kHz with 85 degrees optical scanning angle and quality factor of 162 in air under driving voltages of 19V dc plus 15V pp. Applications to scanning micromirrors, optical switches, and variable capacitors are a few of the MEMS uses; we present results obtained with MEMS mirrors.

AB - Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single crystalline silicon with self-aligned comb-sets. The fabrication process with optimal designs of mechanical springs enables the stiction of microstructures in a controlled manner and significantly reduces unwanted compliances on the actuators, preventing unwarranted motion and providing stable operations. The prototype microactuators operate at a resonant frequency around 0.92kHz with 85 degrees optical scanning angle and quality factor of 162 in air under driving voltages of 19V dc plus 15V pp. Applications to scanning micromirrors, optical switches, and variable capacitors are a few of the MEMS uses; we present results obtained with MEMS mirrors.

UR - http://www.scopus.com/inward/record.url?scp=26844557012&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=26844557012&partnerID=8YFLogxK

M3 - Conference article

SP - 403

EP - 406

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SN - 1084-6999

M1 - TPa40

ER -