Self-assembled three-dimensional ZnO nanosize islands on Si substrates with SiO₂ intermediate layer by metalorganic chemical vapour deposition

Self-organized ZnO nanosize islands were successfully synthesized by metalorganic chemical vapour deposition on thermally grown SiO₂ layers on Si (111). Investigation by atomic force microscopy showed that the density and size of the ZnO islands were changed by growth conditions. At the growth temperature of 500°C, the ZnO island density was 5.7 m× 10⁹ cm^-2 with the average island dimensions of 30 nm width and 10 nm height. The formation mechanism is attributed to Volmer-Weber-like nucleation which occurs due to low adhesion probability of ZnO on SiO₂.