Self-expanded microcapillary positive column for highly efficient vacuum ultraviolet sources

Tae Il Lee; Ki Wan Park; Hyeon Seok Hwang; Jong Pil Jegal; Hong Koo Baik

doi:10.1063/1.2206676

Self-expanded microcapillary positive column for highly efficient vacuum ultraviolet sources

Tae Il Lee, Ki Wan Park, Hyeon Seok Hwang, Jong Pil Jegal, Hong Koo Baik

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

We adopted the self-expanded microcapillary positive column from single microhollow cathode discharge as a high efficient vacuum ultraviolet (vuv) sources, employing one power supply circuit with a resistor for easily starting without an additional power supplier and investigated their electrical characteristics and the vuv radiant efficiency, varying the input power. The electrical measurements showed that the discharge passed through two distinct stages: the microhollow cathode discharges stage and the self-expanded microcapillary positive column stage. As a result, the vuv radiant efficiency of the self-expanded microcapillary positive column is about 17 times as high as that of the microhollow cathode discharges at the input power 1.2 W.

Original language	English
Article number	211502
Journal	Applied Physics Letters
Volume	88
Issue number	21
DOIs	https://doi.org/10.1063/1.2206676
Publication status	Published - 2006 May 21

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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abstract = "We adopted the self-expanded microcapillary positive column from single microhollow cathode discharge as a high efficient vacuum ultraviolet (vuv) sources, employing one power supply circuit with a resistor for easily starting without an additional power supplier and investigated their electrical characteristics and the vuv radiant efficiency, varying the input power. The electrical measurements showed that the discharge passed through two distinct stages: the microhollow cathode discharges stage and the self-expanded microcapillary positive column stage. As a result, the vuv radiant efficiency of the self-expanded microcapillary positive column is about 17 times as high as that of the microhollow cathode discharges at the input power 1.2 W.",

author = "Lee, {Tae Il} and Park, {Ki Wan} and Hwang, {Hyeon Seok} and Jegal, {Jong Pil} and Baik, {Hong Koo}",

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AU - Lee, Tae Il

AU - Park, Ki Wan

AU - Hwang, Hyeon Seok

AU - Jegal, Jong Pil

AU - Baik, Hong Koo

PY - 2006/5/21

Y1 - 2006/5/21

N2 - We adopted the self-expanded microcapillary positive column from single microhollow cathode discharge as a high efficient vacuum ultraviolet (vuv) sources, employing one power supply circuit with a resistor for easily starting without an additional power supplier and investigated their electrical characteristics and the vuv radiant efficiency, varying the input power. The electrical measurements showed that the discharge passed through two distinct stages: the microhollow cathode discharges stage and the self-expanded microcapillary positive column stage. As a result, the vuv radiant efficiency of the self-expanded microcapillary positive column is about 17 times as high as that of the microhollow cathode discharges at the input power 1.2 W.

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Self-expanded microcapillary positive column for highly efficient vacuum ultraviolet sources

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