Self-organized ZnO quantum dots on SiO2/Si substrates by metalorganic chemical vapor deposition

Sang Woo Kim; Shizuo Fujita; Shigeo Fujita

doi:10.1063/1.1527690

Self-organized ZnO quantum dots on SiO₂/Si substrates by metalorganic chemical vapor deposition

Sang Woo Kim, Shizuo Fujita, Shigeo Fujita

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Self-organized ZnO quantum dots (QD) were fabricated on SiO₂/Si substrates by metalorganic chemical vapor deposition. The size and density of dots were analyzed by atomic force microscopy. Photoluminescence at 10 K exhibited the broad spectra with band tails up to about 3.55 and 3.65 eV for the as-grown and the annealed ZnO dots, respectively. Results indicated that the broad emission band was due to quantum size effect, showing the dot size inhomogeneity.

Original language	English
Pages (from-to)	5036-5038
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	26
DOIs	https://doi.org/10.1063/1.1527690
Publication status	Published - 2002 Dec 23

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1527690

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title = "Self-organized ZnO quantum dots on SiO2/Si substrates by metalorganic chemical vapor deposition",

abstract = "Self-organized ZnO quantum dots (QD) were fabricated on SiO2/Si substrates by metalorganic chemical vapor deposition. The size and density of dots were analyzed by atomic force microscopy. Photoluminescence at 10 K exhibited the broad spectra with band tails up to about 3.55 and 3.65 eV for the as-grown and the annealed ZnO dots, respectively. Results indicated that the broad emission band was due to quantum size effect, showing the dot size inhomogeneity.",

author = "Kim, {Sang Woo} and Shizuo Fujita and Shigeo Fujita",

year = "2002",

month = dec,

day = "23",

doi = "10.1063/1.1527690",

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AU - Kim, Sang Woo

AU - Fujita, Shizuo

AU - Fujita, Shigeo

PY - 2002/12/23

Y1 - 2002/12/23

N2 - Self-organized ZnO quantum dots (QD) were fabricated on SiO2/Si substrates by metalorganic chemical vapor deposition. The size and density of dots were analyzed by atomic force microscopy. Photoluminescence at 10 K exhibited the broad spectra with band tails up to about 3.55 and 3.65 eV for the as-grown and the annealed ZnO dots, respectively. Results indicated that the broad emission band was due to quantum size effect, showing the dot size inhomogeneity.

AB - Self-organized ZnO quantum dots (QD) were fabricated on SiO2/Si substrates by metalorganic chemical vapor deposition. The size and density of dots were analyzed by atomic force microscopy. Photoluminescence at 10 K exhibited the broad spectra with band tails up to about 3.55 and 3.65 eV for the as-grown and the annealed ZnO dots, respectively. Results indicated that the broad emission band was due to quantum size effect, showing the dot size inhomogeneity.

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Self-organized ZnO quantum dots on SiO₂/Si substrates by metalorganic chemical vapor deposition

Abstract

All Science Journal Classification (ASJC) codes

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