TY - JOUR
T1 - Self-tailored one-dimensional ZnO nanodot arrays formed by metalorganic chemical vapor deposition
AU - Kim, Sang Woo
AU - Ueda, Masaya
AU - Kotani, Teruhisa
AU - Fujita, Shizuo
AU - Fujita, Shigeo
PY - 2003/6/1
Y1 - 2003/6/1
N2 - One-dimensional ZnO nanodot arrays have been realized by metalorganic chemical vapor deposition on SiO2 substrates patterned by focused ion beam (FIB). Especially for the lines with the depth of 5 nm and the length of 0.7, 1.3 or 1.7μm, one, two or three nanodots, respectively, of fairly uniform size 6-nm height and 80-nm width are symmetrically accommodated in a line. These phenomena are translated as "self-tailoring" of ZnO nanodots, i.e., where the nanodots will be predetermined before the growth and is arbitrarily controlled by the nanopatterns. This can be a promising technique to build nanostructure blocks for nanoscale device applications.
AB - One-dimensional ZnO nanodot arrays have been realized by metalorganic chemical vapor deposition on SiO2 substrates patterned by focused ion beam (FIB). Especially for the lines with the depth of 5 nm and the length of 0.7, 1.3 or 1.7μm, one, two or three nanodots, respectively, of fairly uniform size 6-nm height and 80-nm width are symmetrically accommodated in a line. These phenomena are translated as "self-tailoring" of ZnO nanodots, i.e., where the nanodots will be predetermined before the growth and is arbitrarily controlled by the nanopatterns. This can be a promising technique to build nanostructure blocks for nanoscale device applications.
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U2 - 10.1143/jjap.42.l568
DO - 10.1143/jjap.42.l568
M3 - Letter
AN - SCOPUS:0043246524
SN - 0021-4922
VL - 42
SP - L568-L571
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 6 A
ER -