Si-based optical receivers

Joe C. Campbell, Jungwoo Oh, Zhihong Huang

Research output: Contribution to journalConference article

Abstract

Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

Original languageEnglish
Article number07
Pages (from-to)50-58
Number of pages9
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5730
DOIs
Publication statusPublished - 2005 Jul 21
EventOptoelectronic Integration on Silicon II - San Jose, CA, United States
Duration: 2005 Jan 252005 Jan 26

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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