Si-based optical receivers

Joe C. Campbell, Jungwoo Oh, Zhihong Huang

Research output: Contribution to journalConference article

Abstract

Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

Original languageEnglish
Article number07
Pages (from-to)50-58
Number of pages9
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5730
DOIs
Publication statusPublished - 2005 Jul 21
EventOptoelectronic Integration on Silicon II - San Jose, CA, United States
Duration: 2005 Jan 252005 Jan 26

Fingerprint

Optical receivers
Photodiodes
photodiodes
receivers
MSM (semiconductors)
Photodetectors
photometers
Heterojunctions
heterojunctions
field effect transistors
Fabrication
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

Cite this

Campbell, Joe C. ; Oh, Jungwoo ; Huang, Zhihong. / Si-based optical receivers. In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE. 2005 ; Vol. 5730. pp. 50-58.
@article{43c106e1b8f04140a6531b60f189c0bc,
title = "Si-based optical receivers",
abstract = "Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.",
author = "Campbell, {Joe C.} and Jungwoo Oh and Zhihong Huang",
year = "2005",
month = "7",
day = "21",
doi = "10.1117/12.593538",
language = "English",
volume = "5730",
pages = "50--58",
journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",
issn = "1605-7422",
publisher = "SPIE",

}

Si-based optical receivers. / Campbell, Joe C.; Oh, Jungwoo; Huang, Zhihong.

In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE, Vol. 5730, 07, 21.07.2005, p. 50-58.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Si-based optical receivers

AU - Campbell, Joe C.

AU - Oh, Jungwoo

AU - Huang, Zhihong

PY - 2005/7/21

Y1 - 2005/7/21

N2 - Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

AB - Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=21844444779&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=21844444779&partnerID=8YFLogxK

U2 - 10.1117/12.593538

DO - 10.1117/12.593538

M3 - Conference article

AN - SCOPUS:21844444779

VL - 5730

SP - 50

EP - 58

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

SN - 1605-7422

M1 - 07

ER -