Si-based optical receivers

Joe C. Campbell; Jungwoo Oh; Zhihong Huang

doi:10.1117/12.593538

Si-based optical receivers

Joe C. Campbell, Jungwoo Oh, Zhihong Huang

School of Integrated Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge _xSi _1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

Original language	English
Article number	07
Pages (from-to)	50-58
Number of pages	9
Journal	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	5730
DOIs	https://doi.org/10.1117/12.593538
Publication status	Published - 2005
Event	Optoelectronic Integration on Silicon II - San Jose, CA, United States Duration: 2005 Jan 25 → 2005 Jan 26

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

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10.1117/12.593538

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title = "Si-based optical receivers",

abstract = "Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.",

author = "Campbell, {Joe C.} and Jungwoo Oh and Zhihong Huang",

year = "2005",

doi = "10.1117/12.593538",

language = "English",

volume = "5730",

pages = "50--58",

journal = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",

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AU - Campbell, Joe C.

AU - Oh, Jungwoo

AU - Huang, Zhihong

PY - 2005

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AB - Two Ge on Si photodetectors are reported: MSM photodiodes with an amorphous Ge layer to increase the Schottky barrier height and Ge/Ge xSi 1-x/Si heterojunction photodiodes. Monolithic fabrication of Ge PIN photodiodes with Si MOSFETs has also been successfully demonstrated.

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DO - 10.1117/12.593538

M3 - Conference article

AN - SCOPUS:21844444779

SN - 1605-7422

VL - 5730

SP - 50

EP - 58

JO - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

JF - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

M1 - 07

T2 - Optoelectronic Integration on Silicon II

Y2 - 25 January 2005 through 26 January 2005

ER -

Si-based optical receivers

Abstract

All Science Journal Classification (ASJC) codes

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