Si membrane based tactile sensor with active matrix circuitry for artificial skin applications

Minhoon Park, Min Seok Kim, Yon Kyu Park, Jong Hyun Ahn

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15 Citations (Scopus)


The fabrication and the characteristics of an inorganic silicon-based flexible tactile sensor equipped with active-matrix circuitry compatible with a batch microfabrication process are reported. An 8 × 8 array of 260 nm-thick silicon strain gauges along with individual thin film transistor switches was built on a plastic substrate with 1 mm spacing, corresponding to a human spatial resolution at the fingertip. We demonstrated that the sensor shows excellent performances in terms of repeatability of 1.1%, hysteresis of 1.0%, scanning speed of as much as 100 kHz and resolution of 12.4 kPa while maintaining low power consumption and signal crosstalk through a series of experiments.

Original languageEnglish
Article number043502
JournalApplied Physics Letters
Issue number4
Publication statusPublished - 2015 Jan 26


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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