Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300Å) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.
|Number of pages||6|
|Publication status||Published - 2000|
|Event||Micro Power Sources - Proceedings of the International Symposium - Toronto, Ont., Canada|
Duration: 2000 May 14 → 2000 May 16
|Other||Micro Power Sources - Proceedings of the International Symposium|
|Period||00/5/14 → 00/5/16|
All Science Journal Classification (ASJC) codes