SI thin-film anode for microbatteries

Seung Joo Lee, Jong Ki Lee, Hong Koo Baik, Sung Man Lee

Research output: Contribution to conferencePaper


Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300Å) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.

Original languageEnglish
Number of pages6
Publication statusPublished - 2000 Dec 1
EventMicro Power Sources - Proceedings of the International Symposium - Toronto, Ont., Canada
Duration: 2000 May 142000 May 16


OtherMicro Power Sources - Proceedings of the International Symposium
CityToronto, Ont.

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Lee, S. J., Lee, J. K., Baik, H. K., & Lee, S. M. (2000). SI thin-film anode for microbatteries. 100-105. Paper presented at Micro Power Sources - Proceedings of the International Symposium, Toronto, Ont., Canada.