Si-Zr alloy thin-film anodes for microbatteries

Seung Joo Lee, Heon Young Lee, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalConference article

28 Citations (Scopus)

Abstract

Zr-Si thin films were deposited on copper substrates by co-sputtering method of two pure targets. The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The composition was measured by Rutherford backscattering spectroscopy (RBS) and energy-dispersive X-ray spectroscopy (EDS). The electrochemical results showed that alloying with Zr improves the cycling performance, while as a result the reversible capacity decreases. It appears that the electrochemical cycling performance can be further improved by controlling the film deposition conditions such as substrate temperature and bias sputtering.

Original languageEnglish
Pages (from-to)113-116
Number of pages4
JournalJournal of Power Sources
Volume119-121
DOIs
Publication statusPublished - 2003 Jun 1
EventSelected Papers Presented at the 11th IMLB - Monterey, CA, United States
Duration: 2002 Jun 222002 Jun 28

Fingerprint

Sputtering
Anodes
anodes
sputtering
Thin films
cycles
Rutherford backscattering spectroscopy
Substrates
thin films
Alloying
spectroscopy
alloying
Surface morphology
Copper
Energy dispersive spectroscopy
Atomic force microscopy
backscattering
x rays
atomic force microscopy
X ray diffraction

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

Cite this

Lee, Seung Joo ; Lee, Heon Young ; Baik, Hong Koo ; Lee, Sung Man. / Si-Zr alloy thin-film anodes for microbatteries. In: Journal of Power Sources. 2003 ; Vol. 119-121. pp. 113-116.
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Si-Zr alloy thin-film anodes for microbatteries. / Lee, Seung Joo; Lee, Heon Young; Baik, Hong Koo; Lee, Sung Man.

In: Journal of Power Sources, Vol. 119-121, 01.06.2003, p. 113-116.

Research output: Contribution to journalConference article

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T1 - Si-Zr alloy thin-film anodes for microbatteries

AU - Lee, Seung Joo

AU - Lee, Heon Young

AU - Baik, Hong Koo

AU - Lee, Sung Man

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AB - Zr-Si thin films were deposited on copper substrates by co-sputtering method of two pure targets. The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The composition was measured by Rutherford backscattering spectroscopy (RBS) and energy-dispersive X-ray spectroscopy (EDS). The electrochemical results showed that alloying with Zr improves the cycling performance, while as a result the reversible capacity decreases. It appears that the electrochemical cycling performance can be further improved by controlling the film deposition conditions such as substrate temperature and bias sputtering.

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