Si-Zr alloy thin-film anodes for microbatteries

Seung Joo Lee, Heon Young Lee, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalConference articlepeer-review

31 Citations (Scopus)


Zr-Si thin films were deposited on copper substrates by co-sputtering method of two pure targets. The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and atomic force microscopy (AFM). The composition was measured by Rutherford backscattering spectroscopy (RBS) and energy-dispersive X-ray spectroscopy (EDS). The electrochemical results showed that alloying with Zr improves the cycling performance, while as a result the reversible capacity decreases. It appears that the electrochemical cycling performance can be further improved by controlling the film deposition conditions such as substrate temperature and bias sputtering.

Original languageEnglish
Pages (from-to)113-116
Number of pages4
JournalJournal of Power Sources
Publication statusPublished - 2003 Jun 1
EventSelected Papers Presented at the 11th IMLB - Monterey, CA, United States
Duration: 2002 Jun 222002 Jun 28

Bibliographical note

Funding Information:
This work was supported by the Korean Ministry of Science and Technology through the research program for “National Research Laboratory”.

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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