SiGe nanostructure fabrication through selective epitaxial growth using self-assembled nanotemplates

Sang Joon Park, In Chan Hwang, Heung Soon Lee, Jong Yeog Son, Hyungjun Kim

Research output: Contribution to journalConference article

Abstract

Ordered SiGe nanostructures including nanodots (NDs) and nanowires (NWs) were fabricated via selective epitaxial growth (SEG) of SiGe using ultrahigh vacuum chemical vapour deposition (UHV-CVD) on Si openings fabricated using self-assembled nanotemplates of anodic anluminum oxide (AAO) and diblock copolymer (DBC) of polystyrene-block-polymethylmethacrylate (PS-b-PMMA), exhibiting hexagonally arranged nanoholes. SiGe SEG was processed through repeating the unit cycle composed of two separated steps of SiGe growth using disilane (Si2H6) and Germane (GeH4) and chlorine (Cl2 exposure. Cl2 was used to improve the selectivity of SiGe SEG between the Si openings and the oxide area. Ordered SiGe NDs and NWs were fabricated through SiGe SEG of 20 cycles and 400 cycles on AAO/Si, respectively. In addition, ordered SiGe NDs were obtained via SiGe SEG of 20 cycles on SiO2 template, fabricated through pattern transfer of nanoholes of PS-b-PMMA to SiO2/Si. SiGe nanostructure fabrication using both AAO and PS-b-PMMA showed good replication of the nanohole size of the nanotemplates.

Original languageEnglish
Article number012019
JournalIOP Conference Series: Materials Science and Engineering
Volume6
DOIs
Publication statusPublished - 2009
EventEuropean Materials Research Society (E-MRS) 2009 Spring Meeting - Strasbourg, France
Duration: 2009 Jun 82009 Jun 12

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

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