Silicide formation by solid-state diffusion in MO/Si multilayer thin films

Eungjoon Chi, Jaeyeob Shim, Joonseop Kwak, Hongkoo Baik

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Abstract

The solid-state reaction of Mo/Si multilayer thin films produced by the r.f. magnetron sputtering technique was examined using differential scanning calorimetry (DSC) and X-ray diffraction and was explained by the concepts of effective driving force and effective heat of formation. In constant scanning-rate DSC, there were two exothermic peaks representing the formation of h-MoSi2 and t-MoSi2, respectively. The activation energy for the formation of h-MoSi2 was 1.5 eV, and that of t-MoSi2 was 7.8 eV. Nucleation was the rate-controlling mechanism for each suicide formation. The amorphous phase was not formed in the Mo/Si system as predicted by the concept of effective driving force. h-MoSi2, the first crystalline phase, was considered to have lower interfacial free energy than t-MoSi2, and by increasing the temperature, it was transformed into more stable t-MoSi2.

Original languageEnglish
Pages (from-to)3567-3572
Number of pages6
JournalJournal of Materials Science
Volume31
Issue number13
DOIs
Publication statusPublished - 1996 Jan 1

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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