Simple method for low-temperature processed In-Ga-Zn-O thin-film transistors by vertical diffusion technique

Si Joon Kim, Seokhyun Yoon, Young Jun Tak, Hyun Jae Kim

Research output: Contribution to journalConference article

Abstract

Here, we proposed a novel and simple strategy for fabricating solution-processed In-Ga-Zn-O thin-film transistors (TFTs) at low annealing temperature via vertical diffusion technique. This technique enables a significant reduction of processing temperatures (< 300°C) with maintaining its electrical performances and is useful in the fabrication of flexible/transparent oxide TFTs.

Original languageEnglish
Pages (from-to)1221-1223
Number of pages3
JournalDigest of Technical Papers - SID International Symposium
Volume46
Issue numberBook 3
DOIs
Publication statusPublished - 2015 Jun 1
Event2015 SID International Symposium - San Jose, United States
Duration: 2015 Jun 4 → …

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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