Single-crystalline silicon-based heterojunction photodiode arrays on flexible plastic substrates

Sangwook Lee, Juree Hong, Ja Hoon Koo, Seulah Lee, Kwanghyun Lee, Seongil Im, Taeyoon Lee

Research output: Contribution to journalArticle

3 Citations (Scopus)


A silicon-based photodiode array was fabricated on a flexible polyethylene terephthalate substrate using a transfer printing technique. A heterojunction structure composed of a 15-nm-thick highly doped hydrogenated amorphous-silicon (n+ a-Si:H) layer and a 3-μm-thick p-type single-crystal silicon (p c-Si) membrane layer was adopted as the active layer of the flexible photodiode. The highly ordered photodiode array formed on the flexible substrate exhibited superior stability in electrical properties under bent conditions with no mechanical deformation. The variation of the spectral quantum efficiency (QE) under short-wavelength light illumination (λ ≤ 580nm) was in excellent agreement with that of a heterojunction photodiode composed of a-Si:H and a bulk c-Si substrate. Relatively low QE values were observed under longer wavelength (λ ≥ 600 nm) illumination due to the finite thickness of the active layer. The C-V measurement results of the fabricated photodiode array were in accordance with the abrupt junction model. A closer inspection of the junction area of the device using high-resolution cross-sectional transmission micrograph exhibited an interface depth of 2 ± 0.5 nm, which is unavoidable in plasma-enhanced a-Si:H deposition processes.

Original languageEnglish
Article number5993528
Pages (from-to)3329-3334
Number of pages6
JournalIEEE Transactions on Electron Devices
Issue number10
Publication statusPublished - 2011 Oct

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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