Single metal gate with dual work functions for FD-SOI and UTB double gate technologies

Daniel Pham, Hongfa Luan, Kaveri Mathur, Barry Sassman, Billy Nguyen, George Brown, Ji Woon Yang, Jungwoo Oh, Peter Zeitzoff, Larry Larson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Chemistry

Engineering & Materials Science