SiO2 aerogel film as a novel intermetal dielectric

Moon Ho Jo, Hyung-Ho Park, Dong Joon Kim, Sang Hoon Hyun, Se Young Choi, Jong Tae Paik

Research output: Contribution to journalArticle

95 Citations (Scopus)

Abstract

A low dielectric constant material for an intermetal dielectric (IMD) is imperative to reduce power dissipation, cross talk, and interconnection delay in the deep submicron device regime. SiO2 aerogel is one of the possible candidate with an inherent low dielectric constant. This article reports on the results of the successful fabrication of a SiO2 aerogel film as well as its material properties and electrical properties. Fundamental physical, chemical, and electrical material properties were evaluated for a SiO2 aerogel film before and after thermal treatment. An inherent low dielectric constant of 2.0 was realized for about 70% porosity of the SiO2 aerogel film and the leakage current density held at a level of 10-7 A/cm2. Preliminary results of the SiO2 aerogel film investigated in our study represent a very positive prospective to IMD applications.

Original languageEnglish
Pages (from-to)1299-1304
Number of pages6
JournalJournal of Applied Physics
Volume82
Issue number3
DOIs
Publication statusPublished - 1997 Aug 1

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aerogels
permittivity
leakage
dissipation
electrical properties
current density
porosity
fabrication

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Jo, M. H., Park, H-H., Kim, D. J., Hyun, S. H., Choi, S. Y., & Paik, J. T. (1997). SiO2 aerogel film as a novel intermetal dielectric. Journal of Applied Physics, 82(3), 1299-1304. https://doi.org/10.1063/1.365902
Jo, Moon Ho ; Park, Hyung-Ho ; Kim, Dong Joon ; Hyun, Sang Hoon ; Choi, Se Young ; Paik, Jong Tae. / SiO2 aerogel film as a novel intermetal dielectric. In: Journal of Applied Physics. 1997 ; Vol. 82, No. 3. pp. 1299-1304.
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Jo, MH, Park, H-H, Kim, DJ, Hyun, SH, Choi, SY & Paik, JT 1997, 'SiO2 aerogel film as a novel intermetal dielectric', Journal of Applied Physics, vol. 82, no. 3, pp. 1299-1304. https://doi.org/10.1063/1.365902

SiO2 aerogel film as a novel intermetal dielectric. / Jo, Moon Ho; Park, Hyung-Ho; Kim, Dong Joon; Hyun, Sang Hoon; Choi, Se Young; Paik, Jong Tae.

In: Journal of Applied Physics, Vol. 82, No. 3, 01.08.1997, p. 1299-1304.

Research output: Contribution to journalArticle

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