Site-specific growth and density control of carbon nanotubes by direct deposition of catalytic nanoparticles generated by spark discharge

Hyungjoo Na, Jae Hong Park, Jungho Hwang, Jongbaeg Kim

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3 Citations (Scopus)


Catalytic iron nanoparticles generated by spark discharge were used to site-selectively grow carbon nanotubes (CNTs) and control their density. The generated aerosol nanoparticles were deposited on a cooled substrate by thermophoresis. The shadow mask on top of the cooled substrate enabled patterning of the catalytic nanoparticles and, thereby, patterning of CNTs synthesized by chemical vapor deposition. The density of CNTs could be controlled by varying the catalytic nanoparticle deposition time. It was also demonstrated that the density could be adjusted by changing the gap between the shadow mask and the substrate, taking advantage of the blurring effect of the deposited nanoparticles, for an identical deposition time. As all the processing steps for the patterned growth and density control of CNTs can be performed under dry conditions, we also demonstrated the integration of CNTs on fully processed, movable silicon microelectromechanical system (MEMS) structures.

Original languageEnglish
Article number409
Pages (from-to)1-7
Number of pages7
JournalNanoscale Research Letters
Issue number1
Publication statusPublished - 2013 Jan 1


All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

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